Overview
- Editors:
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Zhuoqing Yang
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National Key Laboratory of Science and Technology on Micro/Nano Fabrication School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China
- Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors
- Covers a broad spectrum of sensor applications
- Written by leading experts in the field
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About this book
This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.
- Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;
- Covers a broad spectrum of sensor applications;
- Written by leading experts in the field.
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Table of contents (11 chapters)
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- Jiushuai Xu, Erwin Peiner
Pages 19-47
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- Rui You, Wenshuai Lu, Dongdong Han, Yonglai Zhang
Pages 49-73
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- Yunna Sun, Guifu Ding, Yan Wang, Zhuoqing Yang
Pages 75-110
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- Shubham Yadav, Soumya Tripathy, Deblina Sarkar
Pages 133-185
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- Jikai Xu, Zhihao Ren, Bowei Dong, Chenxi Wang, Yanhong Tian, Chengkuo Lee
Pages 187-215
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- Bo Li, Lin Huang, Zhen Qiu
Pages 217-230
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- Yonggang Jiang, Zhiqiang Ma, Dawei Shen
Pages 231-245
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- Hui Yang, Martin A. M. Gijs
Pages 247-282
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- Hirofumi Nogami, Hironao Okada, Seiichi Takamatsu, Narifumi Kawano, Takeshi Kobayashi, Ryutaro Maeda et al.
Pages 283-305
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Back Matter
Pages 307-312
Editors and Affiliations
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National Key Laboratory of Science and Technology on Micro/Nano Fabrication School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, China
Zhuoqing Yang
About the editor
Zhuoqing Yang, PhD, received his BSc and MSc degrees in electromechanical engineering from Harbin Engineering University (HEU), Harbin, China, and his PhD in microelectronics and solid state electronics from Shanghai Jiao Tong University (SJTU). He was as an Assistant Professor at SJTU before becoming a JSPS Postdoctoral Fellow at the National Institute of Advanced Industrial Science and Technology (AIST) in Japan from 2011 to 2013. He returned to SJTU in 2014, where he is now a Full Professor in the School of Electronic Information and Electrical Engineering. Dr. Yang is also Resident Researcher at the National Key Laboratory of Science and Technology on Micro/Nano Fabrication, China. His research is focused on the design, simulation and fabrication of MEMS/NEMS sensors and actuators and 3D fabrications on the surface of flexible fiber for biomedical applications. Dr. Yang is an active Senior Member of the IEEE, a frequent contributor to international journals and conferences, and an editorial board member for the Micro and Nanosystems (MNS) and The Open Materials Science Journal.