SENSARRAY CORP

SensArray Corp provides wafer level process metrology used for monitoring and controlling critical semiconductor manufacturing processes. It offers instruments and software for acquiring, analyzing, visualizing, and managing thermal data, as well as the tools to help boost device quality and output, optimize run times, control process temperatures, reduce downtime, and lower test wafer consumption.

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SENSARRAY CORP

Industry:
Manufacturing Semiconductor

Founded:
1987-01-01

Address:
Santa Clara, California, United States

Country:
United States

Status:
Active


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Apr 21, 2008 Assignee: Sensarray Corporation Inventors: Wayne G. Renken, Mei H. Sun Temperature calibration substrate. Patent number: 5967661 Abstract: An apparatus for …See details»

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